[labnetwork] Turbo pump failure

[LaFleur, David W]

Hi Tzu-Min,

I agree that turbo rebuilding is best left to people who are set up and have the experience in doing these repairs. I use TurboVac  in Orlando Fl. I've been using them for many years and have never been disappointed with their work or their prices. That goes for new turbo pumps too. Their price has never been beat when asking for multiple quotes from different vendors.

Best,

David LaFleur
RIE Equipment Engineer
Harvard University


From: "labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>" <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Tzu-Min Ou <Tzumin.Ou at Colorado.EDU<mailto:Tzumin.Ou at Colorado.EDU>>
Reply-To: "Tzumin.Ou at Colorado.EDU<mailto:Tzumin.Ou at Colorado.EDU>" <Tzumin.Ou at Colorado.EDU<mailto:Tzumin.Ou at Colorado.EDU>>
Date: Tuesday, June 21, 2016 at 2:09 PM
To: Labnetwork Mailing List <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Turbo pump failure

Good day,

Just wanted to thank Utah Nanofab's hospitality and all the participants' selfless sharing. The UGIM in U. of Utah was a wonderful experience for a first-time attendee.

Back to reality, the turbo pump (Leybold Turbovac 361 C with mechanical rotor suspension) on our RIE system was making a loud high-pitched sound, and the controller showed a "failure" status. This turbo pump has been on all the time for the past 2-3 years, except for few unexpected power outage. I am curious if anyone had this kind of turbo pump failure before? What would be the possible causes of the failure?

In addition to that, I am seeking some professional suggestions on how to fix it. Would you recommend to replace the bearing by the professionals, or can this be done by myself (only watched youtube video and it looked quite complicated)? I will deeply appreciate if anyone can share the names of reliable inexpensive repairers and/or the vendors of the repair kit.

Thank you,

Tzu-Min

--
Tzu-Min Ou, Ph.D.
Lab Manager
Colorado Nanofabrication Laboratory
Department of Electrical, Computer, and Energy Engineering
University of Colorado at Boulder
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