[labnetwork] Direct-Write Maskless Aligners

[Kristofor Payer]

Hi All,
We are in the process of evaluating vendors for a Direct-Write (laser) Maskless Aligner.  I have seen the Heidelberg MLA150 system and am impressed with its capabilities and speed; we also have a Heidelberg DWL66 in-house, so we are familiar with the company and their field service.

I am wondering if anyone has experience with other vendors for this type of tool or could provide recommendations for a maskless aligner.  I’m particularly interested in your thoughts on ease of use, system speed and field service/technical support.

Thanks in advance.

Kris


Kristofor R. Payer
Research Specialist
Microsystems Technology Laboratories
Massachusetts Institute of Technology
60 Vassar Street
Building 39, Room 225
Cambridge, MA 02139
617-324-1469
kpayer at mtl.mit.edu