[labnetwork] ZEP-520A7 e-beam resist

[Edmond Chow]

Hi,

I have a related question about ebeam resist. I have been using AquaSAVE as
anticharging layer for ebeam lithography.
However, I can't seem to find the distributor which will sell AquaSAVE in US

Do you have any information about how to get AquaSAVE from US or any
replacement for AquaSAVE?

Thanks in advance.

Edmond

On Tue, May 31, 2016 at 9:01 AM, Peter J Duda III <duda at uchicago.edu> wrote:

> Linda, Leif et al
>
> FYI
>
> GL-2000 has been discontinued recently and is no longer available through
> Gluon Lab.  They claim to be working on other high-performance resists, but
> give no specifics at this time.
>
>
>
> Thanks
>
> Peter J Duda
>
> Technical Manager, Pritzker Nanofabrication Facility
>
> Institute for Molecular Engineering
>
> University of Chicago
>
> 5640 South Ellis Avenue
>
> ERC LL178
>
> Chicago, IL  60637
>
> Office: 773-702-8903
> Pager/Text:  773-652-0480
>
> duda at uchicago.edu
>
> ime.uchicago.edu
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Leif Johansen
> *Sent:* Monday, May 30, 2016 3:52 AM
> *To:* 'Linda Macks' <linda.macks at unsw.edu.au>; labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] ZEP-520A7 e-beam resist
>
>
>
> Hello Linda,
>
>
>
> Last time we purchased ZEP-520 was back in May 2014. We got it from
> Marubeni http://www.marubeni.com/
>
> We have actually stopped using ZEP-520 due to the very high price.
> Instead, we have switched to AR-P C-6200 from Allresist GmbH
> http://www.allresist.com/csar-62-ar-p-6200/. If you are interested, we
> can provide you with more process details about this resist.
>
> Another alternative would be the gL-2000 from Gluon Lab, which we
> purchased through Fine Material System Inc in Japan. We have tested this
> resist once, but we are not using it routinely in the lab.
>
>
>
> Best regards,
>
> Leif
>
>
>
> *Leif S. Johansen *
>
> Head of Operations
>
> DTU Danchip
>
>
>
> *Technical University of Denmark*
>
> [image: http://www.dtu.dk/images/DTU_email_logo_01.gif]
>
> Danchip
>
> Ørsteds Plads, Byg. 347
>
> 2800  Lyngby
>
> Direct +45 45255713
>
> Mobile +45 25348992
>
> lesjo at danchip.dtu.dk
>
> www.danchip.dtu.dk/
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [
> mailto:labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>] *On
> Behalf Of *Linda Macks
> *Sent:* 28. maj 2016 02:15
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] ZEP-520A7 e-beam resist
>
>
>
> Hello labnetworkers,
>
>
>
> We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows
> of a supplier who can deliver to Australia, I would appreciate contact
> details.
>
>
>
> Many thanks,
>
>
>
> Linda
>
>
>
>
>
> *Dr Linda Macks*
>
> Facility Manager, ANFF-NSW
>
> Australian National Fabrication Facility
>
>
>
> School of Electrical Engineering & Telecommunications
>
> University of New South Wales
>
> UNSW Sydney NSW 2052
>
> Australia
>
>
>
> Phone: +61 (2) 9385 7845
>
> Fax: +61(2) 9385 5114
>
> Email: linda.macks at unsw.edu.au
>
>
>
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>


-- 
Edmond Chow
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