[labnetwork] ZEP-520A7 e-beam resist
Michael Rooks
michael.rooks at yale.edu
Tue May 31 16:12:02 EDT 2016
For pmma and zep we simply sputter 20nm Au on top, then later remove it
with KI/I gold etch (from Transene).
For HSQ on insulators we use our own mixture of PSS, a water soluble
polymer, with gold on top. You can find the details here
<http://nano.yale.edu/sites/default/files/files/pssa.pdf>. It's very cheap.
--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>
On 05/31/2016 12:38 PM, Edmond Chow wrote:
> Hi,
>
> I have a related question about ebeam resist. I have been using
> AquaSAVE as anticharging layer for ebeam lithography.
> However, I can't seem to find the distributor which will sell AquaSAVE
> in US
>
> Do you have any information about how to get AquaSAVE from US or any
> replacement for AquaSAVE?
>
> Thanks in advance.
>
> Edmond
>
> On Tue, May 31, 2016 at 9:01 AM, Peter J Duda III <duda at uchicago.edu
> <mailto:duda at uchicago.edu>> wrote:
>
> Linda, Leif et al
>
> FYI
>
> GL-2000 has been discontinued recently and is no longer available
> through Gluon Lab. They claim to be working on other
> high-performance resists, but give no specifics at this time.
>
> Thanks
>
> Peter J Duda
>
> Technical Manager, Pritzker Nanofabrication Facility
>
> Institute for Molecular Engineering
>
> University of Chicago
>
> 5640 South Ellis Avenue
>
> ERC LL178
>
> Chicago, IL 60637
>
> Office: 773-702-8903 <tel:773-702-8903>
> Pager/Text: 773-652-0480 <tel:773-652-0480>
>
> duda at uchicago.edu <mailto:duda at uchicago.edu>
>
> ime.uchicago.edu
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__ime.uchicago.edu&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=txauFZDRNt39sv6hSAlCenH1wfF7k-cTqV80LnAh-lg&e=>
>
> *From:*labnetwork-bounces at mtl.mit.edu
> <mailto:labnetwork-bounces at mtl.mit.edu>
> [mailto:labnetwork-bounces at mtl.mit.edu
> <mailto:labnetwork-bounces at mtl.mit.edu>] *On Behalf Of *Leif Johansen
> *Sent:* Monday, May 30, 2016 3:52 AM
> *To:* 'Linda Macks' <linda.macks at unsw.edu.au
> <mailto:linda.macks at unsw.edu.au>>; labnetwork at mtl.mit.edu
> <mailto:labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] ZEP-520A7 e-beam resist
>
> Hello Linda,
>
> Last time we purchased ZEP-520 was back in May 2014. We got it
> from Marubeni http://www.marubeni.com/
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__www.marubeni.com_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=EtvHsu62p-Fb3Flqssz76lbw0w8FOd4Nphxsppe_X1c&e=>
>
> We have actually stopped using ZEP-520 due to the very high price.
> Instead, we have switched to AR-P C-6200 from Allresist GmbH
> http://www.allresist.com/csar-62-ar-p-6200/
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__www.allresist.com_csar-2D62-2Dar-2Dp-2D6200_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=V3R48he1i7j8wgR2Ongk8aobIDJeprgB8ZUFRRlBblE&e=>.
> If you are interested, we can provide you with more process
> details about this resist.
>
> Another alternative would be the gL-2000 from Gluon Lab, which we
> purchased through Fine Material System Inc in Japan. We have
> tested this resist once, but we are not using it routinely in the
> lab.
>
> Best regards,
>
> Leif
>
> *Leif S. Johansen *
>
> Head of Operations
>
> DTU Danchip
>
> *Technical University of Denmark*
>
>
>
> http://www.dtu.dk/images/DTU_email_logo_01.gif
>
> Danchip
>
> Ørsteds Plads, Byg. 347
>
> 2800 Lyngby
>
> Direct +45 45255713 <tel:%2B45%2045255713>
>
> Mobile +45 25348992 <tel:%2B45%2025348992>
>
> lesjo at danchip.dtu.dk <mailto:lesjo at danchip.dtu.dk>
>
> www.danchip.dtu.dk/
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__www.danchip.dtu.dk_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=bad6otKPG_IPaLUNRy_wPwTwiOheGoHbLQS8KTbnNz4&e=>
>
>
> *From:*labnetwork-bounces at mtl.mit.edu
> <mailto:labnetwork-bounces at mtl.mit.edu>
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Linda Macks
> *Sent:* 28. maj 2016 02:15
> *To:* labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] ZEP-520A7 e-beam resist
>
> Hello labnetworkers,
>
> We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone
> knows of a supplier who can deliver to Australia, I would
> appreciate contact details.
>
> Many thanks,
>
> Linda
>
> *Dr Linda Macks*
>
> Facility Manager, ANFF-NSW
>
> Australian National Fabrication Facility
>
> School of Electrical Engineering & Telecommunications
>
> University of New South Wales
>
> UNSW Sydney NSW 2052
>
> Australia
>
> Phone: +61 (2) 9385 7845 <tel:%2B61%20%282%29%209385%207845>
>
> Fax: +61(2) 9385 5114 <tel:%2B61%282%29%209385%205114>
>
> Email: linda.macks at unsw.edu.au <mailto:linda.macks at unsw.edu.au>
>
>
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>
>
> --
> Edmond Chow
>
>
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