[labnetwork] Ebeam deposition of Gold

[Chito Kendrick]

We have a Denton electron beam deposition system for doing Cr/Au and 
most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply.

We were using a carbon crucible for gold, but it it looked like we were 
getting carbon contamination so I switch to a tungsten crucible (7 cc). 
This seemed to be going well, except we are now having to increase the 
beam current after each run to melt the gold and to get the same rate. I 
have changed the filament and there was no improvement. I put in some 
more gold, but that seems to have made is worse. Could I have over 
filled the crucible so there is too much mass to melt? All the other 
materials we have seem to not have changed and it was only the gold we 
change the crucible to.

I am very tempted to order a new crucible or find away of getting the 
gold out of the W crucible to reduce the mass.

Chito Kendrick

-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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