[labnetwork] Ebeam deposition of Gold

[Mike Young]

Hi Chito. I might be missing something, but why do you perceive this to 
be a bad thing? Why not just use the higher beam current and be done 
with it?

--Mike


On 11/11/2016 4:43 PM, Chito Kendrick wrote:
>
> We have a Denton electron beam deposition system for doing Cr/Au and 
> most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply.
>
> We were using a carbon crucible for gold, but it it looked like we 
> were getting carbon contamination so I switch to a tungsten crucible 
> (7 cc). This seemed to be going well, except we are now having to 
> increase the beam current after each run to melt the gold and to get 
> the same rate. I have changed the filament and there was no 
> improvement. I put in some more gold, but that seems to have made is 
> worse. Could I have over filled the crucible so there is too much mass 
> to melt? All the other materials we have seem to not have changed and 
> it was only the gold we change the crucible to.
>
> I am very tempted to order a new crucible or find away of getting the 
> gold out of the W crucible to reduce the mass.
>
> Chito Kendrick
>
> -- 
> Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20161112/527d3acf/attachment.html>