[labnetwork] CO2 purity for CPD?

[Michael Hume]

Hi Mariusz,

We use bone dry 3.0 liquid withdrawal CO2. I can't say that we've ever done
any analysis of the benefits of moving to a higher purity. I'd be
interested in any comments as well.

Regards,
-Mike.

On Fri, Oct 28, 2016 at 2:18 AM, Mariusz Martyniuk <
mariusz.martyniuk at uwa.edu.au> wrote:

> Dear LabNetwork,
>
>
>
> I would like to investigate what purity of CO2 is being used for Critical
> Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply
> with a comment if you are using CPD? Did anyone investigate if there are
> significant benefits of using  5N over 3N purity of CO2?
>
>
>
> Cheers,
>
> Marius
>
>
>
> Mariusz Martyniuk
> -----------------------------
> Associate Professor, ANFF-WA Managing Director
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-- 

Michael Hume

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4
www.nanofab.ualberta.ca Ph: 587-879-1519
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