[labnetwork] CO2 purity for CPD?

[Robert M. HAMILTON]

Mariusz Martyniuk

The UC Berkeley Marvell NanoFabrication Laboratory uses a LCO2 grade sold
by Praxair as "ultra high purity:

Praxair p/n: CD 3.0-KS, 3.0, 99.9 purity

Bob Hamilton
Marvell NanoLab Equipment Manager


Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/



On Fri, Oct 28, 2016 at 1:18 AM, Mariusz Martyniuk <
mariusz.martyniuk at uwa.edu.au> wrote:

> Dear LabNetwork,
>
>
>
> I would like to investigate what purity of CO2 is being used for Critical
> Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply
> with a comment if you are using CPD? Did anyone investigate if there are
> significant benefits of using  5N over 3N purity of CO2?
>
>
>
> Cheers,
>
> Marius
>
>
>
> Mariusz Martyniuk
> -----------------------------
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