[labnetwork] PZT Dry Etch

[sunanda.babu at cense.iisc.ernet.in]

Dear all,

Can someone share their experience regarding PZT dry etch? Our PZT  etch
recipe etch is a sputter etch based recipe, can it be mixed up with tools
which predominantly run Cl-based processes?  Any special maintenance
procedures or mechanical cleans or plasma cleans done?

thanks and best regards,
Sunanda Babu
Technology Manager(Dry etch and Thin Films),
National Nano Fabrication Centre,
Indian Institute of Science, Bangalore, India


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