[labnetwork] Blisters on PMMA resists

[Shivakumar Bhaskaran]

Hi All,

We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.

Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?

-thanks
-Shiva

SNSF
http://snsf.stanford.edu/

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