[labnetwork] Blisters on PMMA resists

[Mike Young]

Hi Shiva. We had this problem a while back. Turned out to be poor thermal contact between the substrate and its mount in the evaporator - we had to tighten the mount springs. The PMMA is getting too hot!

Good luck!

--Mike

> On Apr 5, 2017, at 10:02 PM, Shivakumar Bhaskaran <bshiva at stanford.edu> wrote:
> 
> Hi All,
>  
> We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.
>  
> Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?
>  
> -thanks
> -Shiva
>  
> SNSF
> http://snsf.stanford.edu/ <http://snsf.stanford.edu/>
>  
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-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-3784 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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