[labnetwork] Sputtering PTFE

[Bob Henderson]

Fouad:

 

I agree with Bill Flounders that using C4F8 produces a very uniform Teflon-like film. We produced films in our linear source PECVD system for waterproofing various circuit boards for cell phones and it worked well to a depth of 80 meters in salt water. Bob Henderson

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Wednesday, August 9, 2017 7:07 PM
To: Fouad Karouta
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Sputtering PTFE

 

Use the C4F8 step only of your pulsed gas (Bosch Process) etcher

Bill Flounders

UC Berkeley



 

On Wed, Aug 9, 2017 at 4:52 PM, Fouad Karouta <fouad.karouta at anu.edu.au> wrote:

Hi all,

 

We have a suer looking to sputter teflon (PTFE), I wonder if there is any facility in the network capable of sputtering PTFE.

 

Thanks, Fouad

 

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Email: fouad.karouta at anu.edu.au

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