[labnetwork] KOH etch of silicon

[Michael Rooks]

Long ago in 1995 I wrote a paper that includes the KOH etching process. 
See http://avs.scitation.org/doi/10.1116/1.588258  also known as JVST B 
v13(6) 2745 (1995).

If your customer is concerned about potassium ions then you can use a 
strong solution of TMAH instead. You can purchase 25% TMAH pre-mixed. 
It's a lot more expensive than KOH.

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 08/11/2017 09:03 AM, Mathilde Isabelle Barriet wrote:
> Dear All,
>
> I have a user who wants to do KOH etch of silicon but since we do not have an established process in the lab, I am wondering if I could get some practical guidance on the best set ups.
>
> Also, this user is especially concerned about contaminating his Si wafers with metals so I wonder what degree of purity of KOH is commonly used and if buying the best quality available make a difference on the Si contamination or not.
>
> If anyone has experience with this, please let me know.
>
> Thanks
> Mathilde
>
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