[labnetwork] materials question

Carsen Kline carsen at stanford.edu
Mon Aug 14 11:56:39 EDT 2017


Hello Rick,

We avoid zinc and its alloys (brass etc) in all of our deposition 
systems. This is to do with its high vapor pressure, especially when 
heated, and tendency to poison a vacuum system, keeping you from 
achieving historically good base pressures. I'd refer you to this site 
for a scratch-the-surface explanation:
http://www.mtm-inc.com/ac-20120328-vacuum-compatible-metals-and-alloys.html

You might be able to approach it if you had a high confidence method of 
switching to zinc-mode and capturing all the sputtered or evaporated 
material. Lots of shielding, foil, and minimized time in the chamber. A 
dedicated "dirty" system would be preferable.

We're open to zinc oxide, though no one has tried it. In this case I 
would start from a zinc oxide target and add a little oxygen to keep it 
in oxide form, rather than trying to reactively sputter from a zinc target.

Regards,

Carsen

On 8/14/2017 8:16 AM, Morrison, Richard H., Jr wrote:
>
> HI Everyone,
>
> Does anybody have any experience with evaporation or sputter of Zinc? 
> Any concerns out there?
>
> Thanks
>
> Rick
>
> Richard H. Morrison
>
> Principal Member of the Technical Staff
>
> Draper
>
> 555 Technology Square
>
> Cambridge, MA
>
> 02139-3573
>
> Work  617-258-3420
>
> Cell  508-930-3461
>
> www.draper.com <http://www.draper.com>
>
> ------------------------------------------------------------------------
> Notice: This email and any attachments may contain proprietary (Draper 
> non-public) and/or export-controlled information of Draper. If you are 
> not the intended recipient of this email, please immediately notify 
> the sender by replying to this email and immediately destroy all 
> copies of this email.
> ------------------------------------------------------------------------
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-- 
Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
Paul G. Allen Bldg 131
Stanford, CA  94305
(650)724-8214
carsen at stanford.edu
http://snf.stanford.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20170814/06888a18/attachment.html>


More information about the labnetwork mailing list