[labnetwork] materials question
Carsen Kline
carsen at stanford.edu
Mon Aug 14 11:56:39 EDT 2017
Hello Rick,
We avoid zinc and its alloys (brass etc) in all of our deposition
systems. This is to do with its high vapor pressure, especially when
heated, and tendency to poison a vacuum system, keeping you from
achieving historically good base pressures. I'd refer you to this site
for a scratch-the-surface explanation:
http://www.mtm-inc.com/ac-20120328-vacuum-compatible-metals-and-alloys.html
You might be able to approach it if you had a high confidence method of
switching to zinc-mode and capturing all the sputtered or evaporated
material. Lots of shielding, foil, and minimized time in the chamber. A
dedicated "dirty" system would be preferable.
We're open to zinc oxide, though no one has tried it. In this case I
would start from a zinc oxide target and add a little oxygen to keep it
in oxide form, rather than trying to reactively sputter from a zinc target.
Regards,
Carsen
On 8/14/2017 8:16 AM, Morrison, Richard H., Jr wrote:
>
> HI Everyone,
>
> Does anybody have any experience with evaporation or sputter of Zinc?
> Any concerns out there?
>
> Thanks
>
> Rick
>
> Richard H. Morrison
>
> Principal Member of the Technical Staff
>
> Draper
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--
Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
Paul G. Allen Bldg 131
Stanford, CA 94305
(650)724-8214
carsen at stanford.edu
http://snf.stanford.edu
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