[labnetwork] materials question

Morrison, Richard H., Jr rmorrison at draper.com
Tue Aug 15 06:20:14 EDT 2017


Thanks very much and thanks to the other responses. This helped me to decide to refuse to use this material as I have only one evaporation tool.

Rick


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Carsen Kline
Sent: Monday, August 14, 2017 11:57 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] materials question

Hello Rick,

We avoid zinc and its alloys (brass etc) in all of our deposition systems. This is to do with its high vapor pressure, especially when heated, and tendency to poison a vacuum system, keeping you from achieving historically good base pressures. I'd refer you to this site for a scratch-the-surface explanation:
http://www.mtm-inc.com/ac-20120328-vacuum-compatible-metals-and-alloys.html

You might be able to approach it if you had a high confidence method of switching to zinc-mode and capturing all the sputtered or evaporated material. Lots of shielding, foil, and minimized time in the chamber. A dedicated "dirty" system would be preferable.

We're open to zinc oxide, though no one has tried it. In this case I would start from a zinc oxide target and add a little oxygen to keep it in oxide form, rather than trying to reactively sputter from a zinc target.

Regards,

Carsen
On 8/14/2017 8:16 AM, Morrison, Richard H., Jr wrote:
HI Everyone,

Does anybody have any experience with evaporation or sputter of Zinc? Any concerns out there?

Thanks
Rick


Richard H. Morrison
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