[labnetwork] Looking for cleaning advice - post wire-saw - removing slurry from wafers

Wed Aug 16 20:40:17 EDT 2017

After 35 some years working with Photomask , I recommend a cleaning system be high pressure jets or the chemical ones , but NOT the use of any brushes, they damage more than they help.. soft cleaning tissues n cleaning solutions by hand works just well. 

Sent from Yahoo Mail for iPhone
Mario Portillo, hbtusainc at yahoo.com

On Wednesday, August 16, 2017, 4:54 AM, Morrison, Richard H., Jr <rmorrison at draper.com> wrote:

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Hi,

We use a modified mask cleaner sold by Ultra-T (California company). It uses a high pressure water jet that scans across a moving wafer it knocks of debris. We alos have a single wafer/mask cleaner that uses RCA type chemicals and brushes to clean photo mask. I bet a snow clean (air blast with CO2 ice) might work, you get purchases automated snow clean tools.

Ultra T web site is   http://www.ultrat.com/index.html

Mask cleaner is sold by Hamatech   now owned by Suss Microtech

Snow cleaners   http://www.cryosnow.com/index.php/en/Products/

Rick

Richard H. Morrison

Principal Member of the Technical Staff

Draper

555 Technology Square

Cambridge, MA

02139-3573

Work  617-258-3420

Cell  508-930-3461

www.draper.com

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]On Behalf Of Gavin, Frank
Sent: Tuesday, August 15, 2017 5:11 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Looking for cleaning advice - post wire-saw - removing slurry from wafers

I am looking for a process to clean post wire sawing Silicon Carbide substrates.  The material being cleaning is SiC substrates and the abrasive that needs to be removed is a synthetic glycol based fluid mixed with diamond powder.  During the wire sawing process there is also kerf from the SiC as well as the steel cord wire that abrades as well.  It is a very aggressive process and heavy solids need to be removed.  Operators are spending the day hand wiping wafers.  Any advice is welcomed.

Best Regards,

FRANK GAVIN, Sales Eng.

6161 Industrial Way, Livermore CA 94551
(925) 455-5252 ext 2420  Fax: (925) 455-5351

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