[labnetwork] Fw: Implementing Lock-out/Logins on AJA Phase II J sputter system
Chito Kendrick
cekendri at mtu.edu
Thu Aug 17 16:00:01 EDT 2017
I like the vent line for deposition tools as it is likely the first
thing they have to do to get a sample in, but then it might depend on
how you log their usage.
Also, it is very easy to put a solenoid/relay on a air line or control
line to cut the pressure.
Chito Kendrick
On 8/17/2017 2:10 PM, Shepard, Jeremiah J wrote:
>
> We interlock out PVD Sputtering systems via the Process Cooling Water
> flow meter. We interrupt that signal with a simple contact closure so
> the system sees no water flow and will not start up. Once it is
> “enabled” we close that contact via IP addressable relay, and the
> system sees the water flowing again. (we never interrupt the water in
> reality, just the signal to the controller) This has been working
> quite well for us, hope this helps.
>
> Jerry Shepard
>
> Birck Nanotechnology Center
>
> West Lafayette, IN 47909-2057
>
> Phone: 765-494-3480
>
> *From:*labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Michael Young
> *Sent:* Thursday, August 17, 2017 11:06 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Fw: Implementing Lock-out/Logins on AJA
> Phase II J sputter system
>
> Hi Mark. If not the computer, how about just the monitor? Or instead
> of the plasma gas line, how about the vent valve?
>
> --Mike
>
> On 8/17/17 10:02 AM, Mark Hofheins wrote:
>
> Mark Hofheins
>
> mhofheins at unm.edu <mailto:mhofheins at unm.edu>
>
> 505-710-3527
>
> Micro Electronics Technician
>
> Manufacturing Engineering
>
> University of New Mexico MTTC
>
> 800 Bradbury S.E. Suit 235
>
> Albuquerque, New Mexico
>
> 87106-4346
>
> ------------------------------------------------------------------------
>
> *From:*Mark Hofheins
> *Sent:* Thursday, August 17, 2017 7:46 AM
> *To:* labnetwork-bounces at mtl.mit.edu
> <mailto:labnetwork-bounces at mtl.mit.edu>
> *Subject:* Implementing Lock-out/Logins on AJA Phase II J sputter
> system
>
> Hello all,
>
> We have an AJA Phase II J sputter tool that we need to implement
> our "Login" system on.
>
> The system allows for a open /closed circuit at 24v or 115v.
>
> Most all of the sputter system is 230v. I do not want to have to
> power up the computer each time for someone to login and be able
> to use the tool.
>
> At this point I believe that my best option is to have an
> electronic valve in the main plasma gas line as all gasses are
> routed through a single line.
>
> I am looking for suggestions if anyone has a similar system in
> place on an AJA.
>
> Thank you,
>
> Mark Hofheins
>
> mhofheins at unm.edu <mailto:mhofheins at unm.edu>
>
> 505-710-3527
>
> Micro Electronics Technician
>
> Manufacturing Engineering
>
> University of New Mexico MTTC
>
> 800 Bradbury S.E. Suit 235
>
> Albuquerque, New Mexico
>
> 87106-4346
>
>
>
>
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>
> --
> Michael P. Young (574) 631-3268 (office)
> Nanofabrication Specialist (574) 631-4393 (fax)
> Department of Electrical Engineering (765) 637-3784 (cell)
> University of Notre Damemike.young at nd.edu <mailto:mike.young at nd.edu>
> B-38 Stinson-Remick Hall
> Notre Dame, IN 46556-5637
>
>
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--
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295
814-308-4255
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