[labnetwork] Quartz plates for mask making

[Norman Gottron]

Hi Esta,

We buy our 4", 5", 6", and 7" plates from Nanofilm (all borosilicate), but I believe they have soda lime, too (and maybe quartz).  We buy them pre-coated with AZ1518.

We don't do anything special for storage other than keep them in the boxes (which are opaque) under the yellow lights in the cleanroom.  The resist is fairly stable as far as I can tell - even after months and months on the shelf they perform consistently for us.

Regards,

Norman Gottron
Process Engineer, Carnegie Mellon University Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave
Pittsburgh, PA 15213
Phone: 412-268-4205
Fax: 412-268-3497
www.ece.cmu.edu<http://www.ece.cmu.edu/>
www.nanofab.ece.cmu.edu<http://www.nanofab.ece.cmu.edu/>




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta
Sent: Friday, August 18, 2017 9:17 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Quartz plates for mask making

Dear Colleagues,

Our facility getting it first Heidelberg laser write tool. I would like to get advice where to buy quartz or Soda lime plates with Cr (maybe even with resist) to make masks.
In addition, if some can comment how to store them in the cleanroom.

Thank you, Esta


-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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