[labnetwork] Quartz plates for mask making
Noah Clay
nclay at upenn.edu
Fri Aug 18 12:44:24 EDT 2017
Hi Esta,
Congrats on the new tool.
For photomasks, we use Telic:
http://www.telicco.com/
Charles Veith can provide pricing and contact information for this vendor.
Once opened, masks are stored in a cage in the cleanroom (yellow area, no desiccators or N2 purge). We go through a box of masks every 1-2 weeks. You're welcome to visit Penn to work with staff for any process development needs as you get going.
Best,
Noah
Sent from my iPhone
> On Aug 18, 2017, at 09:17, Abelev, Esta <eabelev at pitt.edu> wrote:
>
> Dear Colleagues,
>
> Our facility getting it first Heidelberg laser write tool. I would like to get advice where to buy quartz or Soda lime plates with Cr (maybe even with resist) to make masks.
> In addition, if some can comment how to store them in the cleanroom.
>
> Thank you, Esta
>
>
> -----------------------
> Esta Abelev, PhD
> Technical Director, Petersen Institute of NanoScience and Engineering
> University of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA 15261
> 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu
>
>
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