[labnetwork] Quartz plates for mask making

[Vlahakis, James]

Hi Esta, in the past we have purchased glass photomask blanks from Telic - http://www.teliccompany.com/ - with a photoresist coating (iirc AZ1500).  They were delivered in an opaque, sealed carrier which worked well for storage

jim

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta
Sent: Friday, August 18, 2017 9:17 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Quartz plates for mask making

Dear Colleagues,

Our facility getting it first Heidelberg laser write tool. I would like to get advice where to buy quartz or Soda lime plates with Cr (maybe even with resist) to make masks.
In addition, if some can comment how to store them in the cleanroom.

Thank you, Esta


-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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