[labnetwork] Quartz plates for mask making

[Peter Köllensperger]

Hi Esta,

Heidelberg Instruments may sell mask blanks precoated with CR and resist directly.
The other source is http://www.townetech.com/feo.htm, not Cr but ferroxo coated plates. I've used those and they worked well.

Best regards,

Peter




----------------------------------------------

Dr. Peter A. Köllensperger
Director NanoLab
Norwegian University of Science and Technology (NTNU)
7491 Trondheim

Tel: +47 913 70 718<tel:+47%20931%2070%20718>



On 18 Aug 2017, at 18:01, Abelev, Esta <eabelev at pitt.edu<mailto:eabelev at pitt.edu>> wrote:

Dear Colleagues,

Our facility getting it first Heidelberg laser write tool. I would like to get advice where to buy quartz or Soda lime plates with Cr (maybe even with resist) to make masks.
In addition, if some can comment how to store them in the cleanroom.

Thank you, Esta


-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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