[labnetwork] e-beam crucible liner recommendation for high quality deposition of platinum

[Chen Yulong (Frank)]

Hi,

I would like to use e-beam evaporator to deposition platinum thin film on silicon nitride substrate.
company kurt j. lesker recommend fabmate or graphite crucible liner for platinum. (http://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=pt1)

but according johnson matthey technology, carbon diffused rapidly into platinum (www.technology.matthey.com/pdf/pmr-v14-i1-014-020.pdf). So, if there is better recommendation for crucible liner for platinum, such as PBN (Pyrolytic Boron Nitride) and tungsten.

Thanks.



陈宇龙(CHEN Yulong) PhD Student
Department of Materials Science and Engineering
Southern University of Science and Technology
1088 Xueyuan Blvd, Nanshan District, Shenzhen
Guangdong, PRChina
Post code:518055 
Tel: +86-18589050065
 
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