[labnetwork] Sputtering CuS and Y2O3

[Fouad Karouta]

Hi all,

I am looking for feedback about the use of CuS and/or Y2O3 targets in a multi users facility.

1-      Is there any risk that CuS may decompose during sputtering and contaminate the system with sulphur?

2-      The SDS I consulted for Y2O3 mentioned some hazards and I wonder if there are experiences with this material in the network especially if there are any health concerns.

Thanks,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
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Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
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