[labnetwork] Sputtering CuS and Y2O3

[Brent Gila]

Hi Fouad,

We avoid S containing materials in our multi user tools, you will get 
contamination.  Sulfur has a high vapor pressure and if there is any 
heating on the sputter chimney or if you have a substrate heater, you 
will redeposit/redistribute S in the system and into films.  I have 
always used 1E-4 Torr as the "line in the sand" for an elements vapor 
pressure vs temperature.  Below this pressure, there is a very small 
amount of flux from the element source.  Above this pressure, the 
element can produce a high enough flux for MBE growth.  On a vapor 
pressure/temperature curve, S has a vapor pressure of 1E-4 Torr at the 
50C-60C range and I would imaging that the chimney and shutter will get 
hotter than that during a sputter run.

We have a Y2O3 target and we have no known issues with this material.  
We do store our targets in a desiccator and Y2O3 is hygroscopic, so you 
will want to keep it in a dry ambient when not in the sputter tool.

Best Regards,
Brent

On 8/23/2017 9:48 PM, Fouad Karouta wrote:
>
> Hi all,
>
> I am looking for feedback about the use of CuS and/or Y2O3 targets in 
> a multi users facility.
>
> 1-Is there any risk that CuS may decompose during sputtering and 
> contaminate the system with sulphur?
>
> 2-The SDS I consulted for Y2O3 mentioned some hazards and I wonder if 
> there are experiences with this material in the network especially if 
> there are any health concerns.
>
> Thanks,
>
> Fouad Karouta
>
> *************************************
>
> Manager ANFF ACT Node
>
> Australian National Fabrication Facility
>
> Research School of Physics and Engineering
>
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>
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>
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> Email: fouad.karouta at anu.edu.au <mailto:fouad.karouta at anu.edu.au>
>
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