[labnetwork] Dry etch test pattern for investigation of micro loading effect

[Fouad Karouta]

Hi Frank,

I am not sure what you mean by loading effect. To me, loading effect means: etch rate depends on sample size, sample size small etch rate higher as compared  to same patterns with larger sample. Maybe it is better to explain more in details what you’re after.
Maybe you are mixing up with what is called leg effect which means higher etch rate with larger pattern as compared to smaller patterns.
Regards, Fouad

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen Yulong (Frank)
Sent: Friday, 25 August 2017 11:07 PM
To: labnetwork <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Dry etch test pattern for investigation of micro loading effect

Hi

I am current using an ICP RIE etch tool to fabricate silicon mold for microfluidic. Since the dry etch process have the micro loading effect, I would like to use some test pattern to find the appropriate process.

Does anyone that has some recommend test pattern to investigate the micro loading effect?

Regards,

________________________________
[https://exmail.qq.com/cgi-bin/viewfile?type=logo&domain=sustc.edu.cn]
陈宇龙(CHEN Yulong) PhD Student

Department of Materials Science and Engineering
SUSTech  http://www.sustc.edu.cn/en/
Tel: +86-18589050065

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