[labnetwork] Dry etch test pattern for investigation of micro loading effect

[Chen Yulong (Frank)]

Hi

I am current using an ICP RIE etch tool to fabricate silicon mold for microfluidic. Since the dry etch process have the micro loading effect, I would like to use some test pattern to find the appropriate process.

Does anyone that has some recommend test pattern to investigate the micro loading effect?

Regards,



陈宇龙(CHEN Yulong) PhD Student
Department of Materials Science and Engineering
SUSTech  http://www.sustc.edu.cn/en/
Tel: +86-18589050065
 
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