[labnetwork] PCW Process Chilled Water Service support

[Matthew Moneck]

Hi Patrick,

We are currently operating two fabs, one of which just opened this year.  Both fabs utilize a custom built PCW system, which means it is not as easy to go to a company for a maintenance agreement (note we did opt to do a 3yr service contract with the supplier of our new DI water skid, and I’d be happy to discuss the reasoning behind this decision).  Therefore, we do most of the maintenance ourselves (especially in the old facility) or in collaboration with our Facilities group (especially for larger projects or for tuning/repair of controls).

In the new fab, I would say the general rule of thumb is that almost all components located in the cleanroom are maintained by Nanofab staff and most components in the mechanical room are maintained with the assistance of Facilities.  For instance, filter changes, monitoring and calibration of the conductivity sensor, tie-ins to the cleanroom process tools, and most piping or valve maintenance on cleanroom laterals is handled by Nanofab staff.  Repairs or maintenance of the water pumps, heat exchangers, and PCW water mains are performed by our Facilities group (typically on a time and materials basis).  Our new system also includes redundant heat exchangers and pumps with automated valves that allow us to run one heat exchanger and pump at a time.  We rotate pumps and heat exchangers on a weekly basis.  This sequencing and the automated valves that control the crossover from one pump/exchanger to another are also maintained by our Facilities group.  The same is true for the automated sequencing and valves that control the PCW drain and DI fill sequence that is used to maintain water resistivity.  Despite a heavy reliance on our Facilities group for the larger components of the system, we still closely monitor everything and work with them as much as possible during any maintenance and repairs.

One additional item to note is that chilled water for all of our air handlers (makeup and recirculating air handlers included) comes from a separate system and is maintained by Facilities.

Hope this helps.  I would be happy to discuss any items further if needed.

Best Regards,

Matt

--
Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu<http://www.ece.cmu.edu>
nanofab.ece.cmu.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Johnson, Patrick
Sent: Wednesday, August 30, 2017 8:17 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PCW Process Chilled Water Service support

Good Morning,  We are in the start up phase and bringing up the clean room tools and have encountered maintenance support issues with the PCW skid.  Im curious to know how the other Nanofabs are handling the service of the PCW systems.    Thanks Patrick




Patrick Johnson
George Washington University
Nano Fabrication Lab Manager
Science and Engineering Hall
800 NW 22nd Street Rm-B2815
Washington D.C. 20052
Cell 703 258 2465
Desk 202 994 2346
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