Good Afternoon, I have a two-stack MB-80 used for oxidation and doping and I wonder if anyone can share any installation and/or operation manuals. Thank you in advance for your help, Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu