[labnetwork] Silane Installation below grade

[Michael Hume]

Hello Colleagues,

We are in the process if installing a new PECVD system which will use 100%
SiH4. In reviewing CGA-G13, it states:

>
>
> *7.2 Indoor storage and use*Buildings, rooms, or areas used for silane
> storage shall be constructed in accordance with the requirements of the
> local AHJ. *Silane shall not be stored in locations below grade* and
> silane bulk sources shall not be located indoors. For transfilling
> exceptions, see Section 18.


In our case, an installation below grade may be preferred. I am wondering
if anyone can provide any insight into the reasoning behind this. Does
anybody store/use Silane below grade?

Thank-you,
-Mike.

-- 

*PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081*


Michael Hume

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4
www.nanofab.ualberta.ca Ph: *780-953-5081* (New)*
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