[labnetwork] Silane Installation below grade
John D Shott
shott at stanford.edu
Thu Dec 7 16:22:05 EST 2017
Mike:
Oops, that's "rebarred" not "reverted" walls. And I used to work at Stanford …
Good luck,
John
Sent from my iPhone
On Dec 7, 2017, at 1:19 PM, John D Shott <shott at stanford.edu<mailto:shott at stanford.edu>> wrote:
Mike:
The institution for whom I used to work had a below-grade gas bunker in 1985 … when that was still legal.
In 1995, we constructed two at-grade bunkers: one for toxics, flammable, and pyrophorics and one for corrosives.
The one in which the silane lives has very heavily reverted walls, blast resistant doors, and a flimsy louvered ceiling … with no occupied spaces above or adjacent.
Our AHJ would NEVER, EVER want us to have silane below grade. Despite my status as a leather-helmeted old fart, neither would I.
There are likely online photos of silane "releases" that are quite persuasive.
Good luck,
John
Sent from my iPhone
On Dec 7, 2017, at 1:03 PM, Michael Hume <michael.hume at ualberta.ca<mailto:michael.hume at ualberta.ca>> wrote:
Hello Colleagues,
We are in the process if installing a new PECVD system which will use 100% SiH4. In reviewing CGA-G13, it states:
7.2 Indoor storage and use
Buildings, rooms, or areas used for silane storage shall be constructed in accordance with the requirements of the local AHJ. Silane shall not be stored in locations below grade and silane bulk sources shall not be located indoors. For transfilling exceptions, see Section 18.
In our case, an installation below grade may be preferred. I am wondering if anyone can provide any insight into the reasoning behind this. Does anybody store/use Silane below grade?
Thank-you,
-Mike.
--
PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081
Michael Hume
Operations Manager
University of Alberta - nanoFAB
W1-060 ECERF Building
9107 - 116 Street
Edmonton, Alberta
Canada T6G 2V4
www.nanofab.ualberta.ca<http://www.nanofab.ualberta.ca/> Ph: 780-953-5081* (New)
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