[labnetwork] Silane Installation below grade

[Luciani, Vincent (Fed)]

Hello Mike,

My best guess is that the rule is intended to avoid having a silane explosion made worse by compression.  We have a blow-out wall in our bunker for that reason.

Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Hume
Sent: Thursday, December 07, 2017 1:05 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Silane Installation below grade

Hello Colleagues,

We are in the process if installing a new PECVD system which will use 100% SiH4. In reviewing CGA-G13, it states:

7.2 Indoor storage and use
Buildings, rooms, or areas used for silane storage shall be constructed in accordance with the requirements of the local AHJ. Silane shall not be stored in locations below grade and silane bulk sources shall not be located indoors. For transfilling exceptions, see Section 18.

In our case, an installation below grade may be preferred. I am wondering if anyone can provide any insight into the reasoning behind this. Does anybody store/use Silane below grade?

Thank-you,
-Mike.

--

PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081



Michael Hume

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4
www.nanofab.ualberta.ca<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nanofab.ualberta.ca%2F&data=02%7C01%7Cvincent.luciani%40nist.gov%7C3d7e836cd2e14d35e2ba08d53db5f4a8%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636482774072207527&sdata=8NuCYX7MrQc35N5AbjTcr9nOw1xi2Hc5rVoKl2t8gtY%3D&reserved=0> Ph: 780-953-5081* (New)
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