[labnetwork] Tools for a new lab

[A. William (Bill) FLOUNDERS]

Willyan,
Congratulations on completion of your cleanroom!
I recall your initial inquiries in 2012.
I expect you will receive many labnet responses to your inquiry.
When communicating within/through the network, we avoid
identifying, recommending, or discouraging specific vendors.
However, personal recommendations or advisements are often
offered via separate email directly to the poster.

Network recommendations are more generic and I note Noah Clay from UPenn
has already set an excellent tone by encouraging you to consider a firm for
layout
and install support.

Similarly, I offer two thoughts:
1. Noah is being too modest - UPenn will host the next UGIM conference
https://ugim.nano.upenn.edu/
This is an excellent forum for you to hear personal stories and receive in
person vendor and equipment reviews (good and bad) from many of us.

2. I compliment your initial focus on wet benches and general purpose
lithography
equipment. This is the necessary and best place to start.

I hope to see you in Philadelphia in June 2018.
Bill Flounders
UC Berkeley


On Wed, Dec 13, 2017 at 12:54 PM, Willyan Hasenkamp Carreira <
HASENKAMP at unisinos.br> wrote:

> Hello Everybody,
>
>
>
> I´ve recently registered to this mailing (thanks to Mary Tang from
> Stanford) and it´s great.
>
> We have recently finished our small cleanroom, down south in Brazil, and
> just yesterday we got the grant for purchasing a few microfabrication tools.
>
> Literaly we have nothing, lab is empty... but we would like to start doing
> some microsystems.
>
>
>
> It would be very nice to have your opinion and references on equipment we
> could purchase.
>
> Please consider equipment flexibility, versatility, maintainance cost and
> difficulties. Also, students will be allowed to use them... which can be a
> burden.
>
>
>
> I do not know if we are going in a good direction but we have selected
> some equipment to start with:
>
> - Laserwriter (which way to go? Maskless aligner or direct laser write.
> Any suggestion? Brand? We know of Heidelberg, but what about Microwriter
> ML3 or Picomaster 2000, anyother? Does anybody have some comments?)
>
> - Mask aligner... we will need it if the choice is to go with direct laser
> write... (Here we have suss and evg. Which one would you prefer?)
>
> - Plasma etch – RIE (Any equipment suggestion? We found Oxford
> equipment... any other that could fit?)
>
> - Sputtering/PECVD (Does a dual system for metal and dielectrics make
> sense? Which fabricant do you have a good user and maintainance experience?)
>
> - Wetbench... (its hard to find such things here in Brazil. Do you have
> any configuration suggestion that has being working?)
>
> - Resist coating and development (Any suggestion? Suss has some things but
> are there other suggestions? I think Brewer also have some things...)
>
>
>
> - Other suggestions? Wafer bonding, RTP, spin track for coat and dev,
> oven...
>
>
>
> It is really basic things, we just once dreamed to build such small
> facility 5 years ago and things are fortunately moving.
>
> Also some disclaimer... We have never done it, all the people here
> probably have used your facilities but it is another level to build and run
> one... therefore your honest opion is again extremelly important. Thank you
> all for your attention and I will keep you posted how things move on.
>
>
>
> Kind regards,
>
> Willyan
>
>
>
> --
>
> *Willyan Hasenkamp*
>
> Universidade do Vale do Rio dos Sinos - Unisinos
>
> Instituto Tecnológico de Semicondutores - itt Chip
>
> Escola Politécnica
>
> Programa de Pós-Graduação em Engenharia Elétrica
>
> Av. Unisinos 950, 93022-750, São Leopoldo, RS
>
> www.unisinos.br - Phone: +55 (51) 3591-1122 <+55%2051%203591-1122> /
> Ramal: 3181
>
>
>
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