[labnetwork] Tools for a new lab

[Ted Wangensteen]

One thing that turns out to be surprisingly important is shelve space.  If
you need storage or at least work space for users, keep that in mind. A
place to put your stuff and containers,etc. while working.

Ted Wangensteen
Engineer, and coming from Industry Fabs and previously university NanoFab
environments

On Wed, Dec 13, 2017 at 5:18 PM, Noah Clay <nclay at upenn.edu> wrote:

> Hello Willyan,
>
> It’s great to hear about your new facility.  Congratulations!
>
> Most of us received assistance from experienced semiconductor equipment
> design firms to develop a master plan for tool layout.  It’s great that
> you’re reaching out with advice on fab tools.  While you’re assembling the
> list, if you haven’t already, please consider working with a firm to design
> the tool layout and installation package.
>
> Best wishes,
> Noah Clay
>
> University of Pennsylvania
> Philadelphia, PA
>
> Sent from my iPhone
>
> On Dec 13, 2017, at 21:54, Willyan Hasenkamp Carreira <
> HASENKAMP at unisinos.br> wrote:
>
> Hello Everybody,
>
>
>
> I´ve recently registered to this mailing (thanks to Mary Tang from
> Stanford) and it´s great.
>
> We have recently finished our small cleanroom, down south in Brazil, and
> just yesterday we got the grant for purchasing a few microfabrication tools.
>
> Literaly we have nothing, lab is empty... but we would like to start doing
> some microsystems.
>
>
>
> It would be very nice to have your opinion and references on equipment we
> could purchase.
>
> Please consider equipment flexibility, versatility, maintainance cost and
> difficulties. Also, students will be allowed to use them... which can be a
> burden.
>
>
>
> I do not know if we are going in a good direction but we have selected
> some equipment to start with:
>
> - Laserwriter (which way to go? Maskless aligner or direct laser write.
> Any suggestion? Brand? We know of Heidelberg, but what about Microwriter
> ML3 or Picomaster 2000, anyother? Does anybody have some comments?)
>
> - Mask aligner... we will need it if the choice is to go with direct laser
> write... (Here we have suss and evg. Which one would you prefer?)
>
> - Plasma etch – RIE (Any equipment suggestion? We found Oxford
> equipment... any other that could fit?)
>
> - Sputtering/PECVD (Does a dual system for metal and dielectrics make
> sense? Which fabricant do you have a good user and maintainance experience?)
>
> - Wetbench... (its hard to find such things here in Brazil. Do you have
> any configuration suggestion that has being working?)
>
> - Resist coating and development (Any suggestion? Suss has some things but
> are there other suggestions? I think Brewer also have some things...)
>
>
>
> - Other suggestions? Wafer bonding, RTP, spin track for coat and dev,
> oven...
>
>
>
> It is really basic things, we just once dreamed to build such small
> facility 5 years ago and things are fortunately moving.
>
> Also some disclaimer... We have never done it, all the people here
> probably have used your facilities but it is another level to build and run
> one... therefore your honest opion is again extremelly important. Thank you
> all for your attention and I will keep you posted how things move on.
>
>
>
> Kind regards,
>
> Willyan
>
>
>
> --
>
> *Willyan Hasenkamp*
>
> Universidade do Vale do Rio dos Sinos - Unisinos
>
> Instituto Tecnológico de Semicondutores - itt Chip
>
> Escola Politécnica
>
> Programa de Pós-Graduação em Engenharia Elétrica
>
> Av. Unisinos 950, 93022-750, São Leopoldo, RS
>
> www.unisinos.br - Phone: +55 (51) 3591-1122 <+55%2051%203591-1122> /
> Ramal: 3181
>
>
>
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