[labnetwork] Two SEM/EBLs set up in the same room : comments

[Mark K Mondol]

I think that you would want to have some sort of Spicer or ADE field 
cancellation system on both systems. Large changes in lens current might 
couple to the SEM.

However I defer to Mike Rooks opinion on this as he actually operated a 
lab with both.

I have an Elionix tool about 10 meters from a Raith (Zeiss Gemini 
column) and they seem to do alright, with the Spicer cancellation 
system. There is also a Zeiss Orion He Ion about another 10 meters away 
and a JEOL 2010 TEM nearby too.

Regards,

Mark K Mondol


On 12/19/2017 3:04 PM, Palard, Marylene wrote:
> Dear Lab Managers
> E-beam photolithography/ SEM experts,
>
> At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.
>
> The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.
>
> Assuming that
> - both items are fitting in the room,
> - the manufacturer site survey passed,
> - we agreed with jagged edges pictures due to cleanroom flow
> Could you please share your thoughts on that plan.
>
> Sincerely
> Marylene, an avid reader of the labnetwork messages

-- 
Mark K Mondol
Assistant Director NanoStructures Laboratory
And
Facility Manager
Scanning Electron Beam Lithography Facility
Bldg 36  Room 229
www.rle.mit.edu/sebl
mondol at mit.edu
office - 617-253-9617
cell - 617-224-8756