[labnetwork] Two SEM/EBLs set up in the same room : comments

[Mac Hathaway]

Hi Marylene,

At Harvard CNS, we have two Elionix in the same room, with no ill 
affects.  The columns are maybe 15 ft from each other.

Congrats on your new tool!


Mac

Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012


On 12/19/2017 3:04 PM, Palard, Marylene wrote:
> Dear Lab Managers
> E-beam photolithography/ SEM experts,
>
> At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.
>
> The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.
>
> Assuming that
> - both items are fitting in the room,
> - the manufacturer site survey passed,
> - we agreed with jagged edges pictures due to cleanroom flow
> Could you please share your thoughts on that plan.
>
> Sincerely
> Marylene, an avid reader of the labnetwork messages
>
> _______________________________
> Marylene Palard, Ph.D.
> Program Manager
> http://www.mrc.utexas.edu/
> (512) 965 6671
>
> The University of Texas | Microelectronics Research Center
> Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445
>
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