[labnetwork] Two SEM/EBLs set up in the same room : comments

[Fouad Karouta]

Hi Marylene,
About the remark of having a high resolution SEM in a clean room I am a strong supporter of having the SEM in a CR environment as for developing new etching processes one need to jump from an etcher to SEM and vice versa several times. But I admit it is a controversial subject.
Back to your question: We are in the process of designing a new clean room in which we planned a room for an EBL system (Raith 150) and as we are hoping to get funds to get a 100kV machine we have included the new system with the old one in one room but clean room designers suggested to separate them into two rooms (acoustic from CR filters) so now they are planned in two rooms but the two rooms will be on one concrete stable slab.
Hope this helps,
Fouad Karouta
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Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
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ACT 0200, Canberra, Australia
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Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mac Hathaway
Sent: Wednesday, 20 December 2017 8:42 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Two SEM/EBLs set up in the same room : comments

Hi Marylene,

At Harvard CNS, we have two Elionix in the same room, with no ill affects.  The columns are maybe 15 ft from each other.

Congrats on your new tool!


Mac
Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA  02138
617-495-9012


On 12/19/2017 3:04 PM, Palard, Marylene wrote:

Dear Lab Managers

E-beam photolithography/ SEM experts,



At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.



The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.



Assuming that

- both items are fitting in the room,

- the manufacturer site survey passed,

- we agreed with jagged edges pictures due to cleanroom flow

Could you please share your thoughts on that plan.



Sincerely

Marylene, an avid reader of the labnetwork messages



_______________________________

Marylene Palard, Ph.D.

Program Manager

http://www.mrc.utexas.edu/

(512) 965 6671



The University of Texas | Microelectronics Research Center

Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445



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