[labnetwork] Sodium Flouride Sputtering

[Mark Heiden]

Greetings,

We have been asked to sputter Sodium Flouride in our AJA Orion system and I was wondering if anyone had done this or could share any system contamination or safety concerns on this proposal? I did find targets are commercially available.

Thank you in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551




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