[labnetwork] Ge2Sb2Te5 deposition

[Abelev, Esta]

Hi,

We recently got a request to sputter Ge2Sb2Te5. Does anyone have an experience sputtering this material, our cleanroom have only one metal sputtering system that usually dedicated to following materials Au, Ti, Nb, NbGe, Al (we are not allowing any magnetic materials in this system). Some users expressed concerns regarding Sb  been a UHV pollutant, any comments?

Thank you, Esta

-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20170123/b9372e36/attachment.html>