[labnetwork] doped Poly Question
Morrison, Richard H., Jr.
rmorrison at draper.com
Thu Jan 26 06:26:24 EST 2017
Hi Everyone,
I have the need to deposit In-Situ doped P-Type Polysilicon. Do any of you run that process, is so what feed gas is commonly used?
I understand that In-Situ doped N-Type poly uses P or As mixed with Silane in the same cylinder is that correct?
Do any of you offer P-Type In-Situ doped polysilicon for 150mm wafers?
Thanks
Rick
Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573
Work 617-258-3420
Cell 508-930-3461
www.draper.com<http://www.draper.com>
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