[labnetwork] Does anyone use TriEthylPhosphate (TEPo) in a bubbler?

[Ian Harvey]

Dear Labnetwork,

We are interested in using this material or other liquid source dopant in conformal PSG and are looking for affordable suppliers (including bubbler and equipment to serve it) in liter-ish quantities.

It would be very useful to talk to someone who knows how to do this (suppliers as well as users).

Thank you,

—Ian

Ian R. Harvey, Ph.D.

Associate Director
Utah Nanofab at the University of Utah
Cleanroom Fabrication and nanoImaging & Surface Analysis
801/585-6162 (voicemail)
www.nanofab.utah.edu
http://sal.nanofab.utah.edu

Micron Technology Foundation Inc., Microscopy Suite
Sorenson Molecular Biotechnology Building — A USTAR Innovation Center

36 South Wasatch Drive
Suite 2500
Salt Lake City, Utah   84112-9011



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