[labnetwork] (no subject)

[Fred Newman]

Dear Colleagues,

One of our users has expressed an interest in annealing sol gel PZT around
700C in an Allwin21 AW610 RTA tool.  Has anyone had experience with this
process who could comment on setting up scavenging or abatement of
Pb-containing volatile components from the process gas exhaust, or could
recommend measures to avoid Pb contamination of the tool?  Any advice or
suggestions would be most appreciated.

Many thanks
Fred


-- 
Fred Newman
Research Engineer
Washington Nanofabrication Facility (WNF)
University of Washington
Fluke Hall 115, Box 352143
office 206-616-3534
mobile 505-450-4447
fnewman at uw.edu
https://www.wnf.washington.edu/
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