[labnetwork] [Non-DoD Source] (no subject)

Thu Jun 29 10:30:25 EDT 2017

Fred,

As it happens, six years ago we were in the exact situation you find yourself in today with the exact same model RTA.  There was concern that annealing PZT coated wafers (from a sol gel process) were contaminating the inside surfaces of our AG Heat Pulse 610 RTA.  We ran prime wafers through our "dirty" RTA that had seen PZT annealed at similar temperatures that you mentioned and through our "clean" RTA that had not seen any PZT.  Both were identical AG 610 RTAs.  Following this, we looked for a wide range of elements on and under the surface using SIMS.

In the end, we found absolutely no presence of Pb on the wafer that was annealed in the dirty RTA.  In fact, both wafers' SIMS analysis looked identical.  While we could not rule out that the inside RTA surfaces were contaminated with Pb, this study told us that there was no cross contamination onto subsequent wafers annealed in that same RTA.

Hope this helps.

V/R,

Paul Sunal Ph.D.
Cleanroom Manager, U.S. Army Research Laboratory
Sensors and Electron Devices Directorate (RDRL-SEE)
2800 Powder Mill Road, Adelphi, MD, 20783-1473
Phone: 301-394-1374 : Mobile: 240-676-6209 : Fax: 301-394-1074
E-mail: paul.d.sunal.civ at mail.mil

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fred Newman
Sent: Wednesday, June 28, 2017 9:14 PM
To: labnetwork at mtl.mit.edu
Subject: [Non-DoD Source] [labnetwork] (no subject)

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________________________________

Dear Colleagues,

One of our users has expressed an interest in annealing sol gel PZT around 700C in an Allwin21 AW610 RTA tool.  Has anyone had experience with this process who could comment on setting up scavenging or abatement of Pb-containing volatile components from the process gas exhaust, or could recommend measures to avoid Pb contamination of the tool?  Any advice or suggestions would be most appreciated.

Many thanks
Fred

-- 

Fred Newman
Research Engineer
Washington Nanofabrication Facility (WNF) University of Washington Fluke Hall 115, Box 352143 office 206-616-3534 mobile 505-450-4447 fnewman at uw.edu < Caution-mailto:fnewman at uw.edu > Caution-https://www.wnf.washington.edu/ < Caution-https://www.wnf.washington.edu/ > 