[labnetwork] RTP of PZT

[Bill Flounders]

The Berkeley NanoLab has been using Allwin21
RTA tools for many years to anneal PZT solgel films.

To address cross contamination concerns we have a
dedicated chamber and  'paddle' for PZT processing.
We have additional chambers for other select materials
for the same cross contamination control strategy.
Members request to process special materials and
staff schedule chamber swap and post current tool status.

Allwin21 has provided excellent support of our RTA tools.
They may offer you spare chambers or may direct you to a 3rd
party supplier. We use LP Glass

Bill Flounders
UC Berkeley




On 6/28/2017 6:14 PM, Fred Newman wrote:
> Dear Colleagues,
>
> One of our users has expressed an interest in annealing sol gel PZT 
> around 700C in an Allwin21 AW610 RTA tool.  Has anyone had experience 
> with this process who could comment on setting up scavenging or 
> abatement of Pb-containing volatile components from the process gas 
> exhaust, or could recommend measures to avoid Pb contamination of the 
> tool?  Any advice or suggestions would be most appreciated.
>
> Many thanks
> Fred
>
>
> -- 
> Fred Newman
> Research Engineer
> Washington Nanofabrication Facility (WNF)
> University of Washington
> Fluke Hall 115, Box 352143
> office 206-616-3534
> mobile 505-450-4447
> fnewman at uw.edu <mailto:fnewman at uw.edu>
> https://www.wnf.washington.edu/
>
>
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