[labnetwork] CoFeB sputtering

Tue Mar 28 08:36:41 EDT 2017

Good morning,

Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.)

Thanks,

Nava

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Facilities

Columbia University

530 w120th st., NY 10027

Room 1015/MC 8903

Office: 212-854-9927

Cell: 201-562-7600

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