[labnetwork] CoFeB sputtering

[Gupta, Su]

Dear Nava:

We sputter CoFeB all the time and have no issues to report other than your magnetron needs to be strong enough to sputter a magnetic materials.

Best,
Su Gupta
________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Nava Ariel-Sternberg [na2661 at columbia.edu]
Sent: Tuesday, March 28, 2017 7:36 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] CoFeB sputtering

Good morning,

Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.)

Thanks,
Nava


Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Facilities
Columbia University
530 w120th st., NY 10027
Room 1015/MC 8903
Office: 212-854-9927
Cell: 201-562-7600

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