[labnetwork] Sputter V, VO2

[Bill Flounders]

Fouad,
Appended are several control measures we use when there
might be material concerns. Secondary coating is intriguing
as a mechanism to trap materials on coated surfaces but I
would doubt effective with respect to particulate issues.
Bill Flounders
UC Berkeley

Multiple pump/purge sequences before opening chamber to lab.
Additional aluminum foil shielding which is removed, gently folded,
and placed in ziploc bags immediately after chamber opening.
IPA and wipes and hepa vacuum of chamber internals when complete.
Multiple reminders to never use N2 blow off guns with metal dep systems.

--------------------------------------



Fouad Karouta wrote:
>
> Dear network,
>
> We have an AJA sputter system with over 50 different targets. It is a 
> multi-users facility and we do change targets 2-3 times per week. To 
> minimise possible cross-contamination every target has its own 
> mounting accessories (housing, chimney, etc).
>
> My question relate to possible toxic by-products and we like to share 
> this topic within this network looking to hear your experience with 
> same targets or targets that may produce toxic/dust by-products.
>
> So recently we purchased Vanadium and Vanadium oxide VO2 targets. Our 
> user intends to use reactive sputtering to produce different 
> stoichiometry of the alloys. We found that some forms of vanadium 
> oxide are toxic like V2O4 and V2O5 (highly toxic and poisonous, 
> especially the dust and fumes).
>
> So we like to share the following questions/remarks and we appreciate 
> your comments:
>
> 1-Does someone use targets that may produce such toxic by-products, 
> and how you handle this in a multi-user facility?
>
> 2-Outside an adequate mask + filters do you take any other precautions 
> when opening chamber to change targets?
>
> 3-After the use of such targets with the potential risk of toxic 
> particles would a sputtering a thin layer of an Al or Cr layer would 
> cover the toxic particles and form a possible alternative to this issue?
>
> Thank you,
>
> Fouad Karouta
>
> *************************************
>
> Manager ANFF ACT Node
>
> Australian National Fabrication Facility
>
> Research School of Physics and Engineering
>
> L. Huxley Building (#56), Mills Road, Room 4.02
>
> Australian National University
>
> ACT 0200, Canberra, Australia
>
> Tel: + 61 2 6125 7174
>
> Mob: + 61 451 046 412
>
> Email: fouad.karouta at anu.edu.au <mailto:fouad.karouta at anu.edu.au>
>
> http://anff-act.anu.edu.au/
>
>
>
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