[labnetwork] Raith vs. Elionix E-beam writers

[Zhihong Wang]

Kevin,

Yes, I agree with Bill.
If you are looking at a 50 kV E-beam Lithography system, Crestec should be one of the options. We have had a Crestec CABL 9000 system here at KAUST for 9 years. It works well.

Regards,
Zhihong Wang
Advanced Nanofabrication Core Laboratory
King Abdullah University of Science and Technology


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Tuesday, October 03, 2017 7:26 PM
To: Kevin McPeak <kmcpeak at lsu.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Raith vs. Elionix E-beam writers

Kevin,
I would encourage including Crestec in this comparison set.
Following Labnet protocol, I will send more specific
vendor and equipment comments 'off line'.

Congratulations! on your NSF award.
Bill Flounders
UC Berkeley

On Tue, Oct 3, 2017 at 4:50 AM, Kevin McPeak <kmcpeak at lsu.edu<mailto:kmcpeak at lsu.edu>> wrote:
Dear Colleagues,

My colleagues at Tulane University and I recently were awarded an NSF
MRI grant for an E-beam lithography system. We are currently looking
at two different suppliers for this system, Raith and Elionix. For
Raith we are looking at their Voyager100 (50 kV) and E-Line Plus (30
kV) systems and for Elionix we are looking at their latest ELS-S50EX
(50 kV) model. All three systems have been placed within our budget.

Our group of e-beam writers is interested in achieving both large
single field sizes of periodic arrays of nanostructures (e.g. ~200 nm
features over 500 um x 500 um region) and excellent stitching accuracy
for writing 5 mm x 5 mm arrays of nanostructures.

I would appreciate any input you have on using Raith and Elionix
systems for high-performance e-beam writing (i.e. custom support,
usability, uptime, etc.)

Thank you.

Regards,
Kevin

--
Kevin M. McPeak
Assistant Professor
Louisiana State University
Dept. of Chemical Engineering
110 Chemical Engineering Bldg Room 324
S. Stadium Drive
Baton Rouge, LA  70803
email: kmcpeak at lsu.edu<mailto:kmcpeak at lsu.edu>
phone: 225-578-0058<tel:225-578-0058>

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