[labnetwork] Etching glass with Bismuth Oxide

[Jugessur, Aju S]

Hi all,

We have a user who is trying to dry etch (> 5-10 microns deep) into a glass material that has the following composition:


16 % PbO
46 % Bi2O3
30 % Ga2O3
8 % B2O3


I was wondering if anyone has some experience with something similar. We do have Oxford PlasmaPro instrument with BCl3, Cl2, Ar, O2 and CH4 connected right now.

Any suggestions will be greatly appreciated.


Thanks
Aju


Aju Jugessur, Ph.D.
Director, University of Iowa Microfabrication Facility (UIMF)
Optical Science and Technology Center
Professor Adjunct, Physics and Astronomy
University of Iowa
Office: IATL 202, Tel: 319-3532342
Labs: IATL 170, 172, 174
https://ostc.uiowa.edu/uimf






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