[labnetwork] Etch rate of expired BOE solution

[Savitha P]

Hi all,


We have a lot of BOE(13:2) solution expired in 2014, which has been seeing declining oxide etch rates since sometime.  Is there some way of improving the etch rate, like by adding fresh HF (50%).


Kindly let me know if anyone has information on this.


Regards,


Savitha

________________________________

Dr. Savitha P
Chief Operating Officer
National Nanofabrication Centre
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph. +91 80 2293 3254
www.cense.iisc.ac.in
*Please note the change in my e-mail id*
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