[labnetwork] TEL tools

[Vicky Diadiuk]

Hi,
 Does anybody have Tokyo Electron machines in a shared facility?
If so, can they be made to accept wafers & samples smaller than 8” (e.g. by using handle-wafers)?

Any insights would be highly appreciated.
Thx,
 Vicky 



Dr. Vicky Diadiuk
Associate Director, Fab Operations
Microsystems Technology Laboratories
Massachusetts Institute of Technology
Room 39-219
Cambridge, MA 02139
Tel: 617-253-0731
diadiuk at mit.edu
http://www.mtl.mit.edu



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